The Method of Solid State Impurity Diffusion and Doping In 4H-SiC (Suwan Mendis, Chin-Che Tin, Ilkham G. Atabaev, & Bakhtiyar G. Atabaev, Trans.). (2013). International Journal of Fundamental Physical Sciences, 3(4), 75-78. https://doi.org/10.14331/ijfps.2013.330059